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Category | Measuring system |
Type | Spect | |
Organizational unit | ||
Person in charge | ||
Üzembentartó | Atomki-University of Debrecen | |
Application | Research, Service | |
Value | high value |
The Spect photoelectron spectrometer is a recently commissioned equipment at Atomki, which is equiped to the SNMS/SIMS mass spectrometer in a common vacuum system. This arrangement enables the analysis of solid-state samples in ultra-high vacuum carrying without opening the vacuum chamber. While mass spectrometry measurements can be performed in the SNMS/SIMS part of the system, the chemical state of elements can be determined in the XPS part. A complete quantitative surface analysis can be performed with high depth resolution (~1 nm) or high lateral distribution.
The Spect photoelectron spectrometer is a recently commissioned equipment at Atomki, which is equiped to the SNMS/SIMS mass spectrometer in a common vacuum system. This arrangement enables the analysis of solid-state samples in ultra-high vacuum carrying without opening the vacuum chamber. While mass spectrometry measurements can be performed in the SNMS/SIMS part of the system, the chemical state of elements can be determined in the XPS part. A complete quantitative surface analysis can be performed with high depth resolution (~1 nm) or high lateral distribution.