The only Hungarian Electron Cyclotron Resonance (ECR) Ion Source (ECRIS) is operated at Atomki. As a member of the Atomki Particle Accelerator Centre, ECRIS provides plasma and ion beams as a stand-alone low-energy accelerator.

Main fields of activities:

• fundamental research (astrochemistry, atomic physics, plasma physics) and
• some applications (surface physics, medical implants).

• Proton     energy: 200 keV - 4 MeV,     current: up to 200 eµA,     brightness: 8-16 Amp(rad)^-2m^-2eV^-1
• Helium     energy: 200 keV - 6 MeV,     current: up to 40 eµA
• Other ions: e.g. B, C, O, S, Si, Cu etc.     energy: 200 keV ~ 10 MeV (depending on charge state),     current: up to 10-50 eµA (depending on ion species)
• Terminal voltage stability: ± 30 V / 4 hrs (slits stabilization)
• Terminal voltage ripple: 25 V_RMS

The ESA-22 high energy resolution electronspectrometer consists of a spherical and cylindrical mirror analyzer. It is capable to measure the angular distribution of the energetically analyzed electrons ejected from the target in the ±15^o and ±165^o angular region.

The vacuum ultraviolet light source (VUV) produces photons in the 8.4 - 48.4 eV energy region by exciting different noblegas atoms with the help of ECR plasma.